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PABG1000 – Air Floating XY Stage

journey ；400mm Straightness ；±1µm/full stroke Flatness ；±2µm/full stroke Yaw angle ；+2arc-sec pitch angle ；+2arc-sec Error mapping accuracy ；±1μm Repeatability in both directions ；0.5µm

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Marble Motion Positioning Stages

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Ultra-Precision · Frictionless Motion · Cleanroom Compatible
Ⅰ. Product Overview
The PABG1000 Air Floating XY Stage from W-Robot represents the pinnacle of precision positioning technology. Using an advanced air bearing structure, the stage provides near-zero friction, no mechanical contact, and ultra-smooth motion, achieving sub-micron accuracy and superior repeatability.
Designed for high-end applications such as semiconductor manufacturing, optical alignment, and metrology, the PABG1000 ensures high-speed stability with excellent load capacity. Its air-lubricated platform delivers consistent performance in cleanroom environments, making it an ideal choice for next-generation precision equipment.
Ⅱ. Technical Features
Air Bearing Design: Provides frictionless linear motion and eliminates mechanical wear.
High Precision: Achieves sub-micron level positioning accuracy and exceptional repeatability.
Smooth & Silent Motion: Ideal for vibration-sensitive and noise-free workspaces.
Large Travel Range: Supports customizable XY stroke up to 1000 × 1000 mm.
High Rigidity Structure: Maintains stability under dynamic acceleration and deceleration.
Cleanroom Compatible: No particle generation, suitable for semiconductor or optical applications.
Optional Z-Axis or Rotary Stage Integration: Expandable into 3-axis or multi-degree motion systems.
Ⅲ. Application Fields
Semiconductor wafer inspection & lithography platforms
Optical measurement and alignment systems
Precision machining and laser processing
Scientific research and laboratory automation
Coordinate measuring machines (CMM)
High-end electronics assembly lines
Ⅳ. Model Selection & Customization
W-Robot provides full customization support to meet unique system requirements:
XY stroke configurable (e.g. 500×500 mm, 1000×1000 mm, etc.)
Load capacity tuning for payload and acceleration needs
Integrated feedback systems: optical encoders, laser interferometers
Vacuum-compatible versions for special applications
CAD models (2D/3D) and documentation available on request
Ⅴ. Product Advantages
Non-contact design → No mechanical wear, longer lifespan
Exceptional accuracy → Sub-micron repeatability
Maintenance-free → No lubrication or mechanical parts
Silent and vibration-free motion
Ideal for cleanroom and precision assembly environments
Compatible with modular automation systems
Ⅵ. Installation & Maintenance
Ensure stable air supply with clean, dry air (filtered to 0.01 μm)
Maintain flatness and rigidity of the mounting surface
Avoid mechanical impact or sudden load changes during operation
Periodically check air pressure and filter system
Keep optical encoder and guideway areas clean
Store in dust-free and humidity-controlled conditions when idle
Ⅶ. Learn More
Explore more with W-Robot:
🌐 www.w-robot.com
Recommended reading:
“Air Bearing Technology in Precision Motion Systems”
“How Air Floating Stages Improve Semiconductor Accuracy”
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Listed below are answers to our most commonly asked questions. Don't see your question?Contact our customer service team. We would be glad to assist you.

FAQ

Listed below are answers to our most commonly asked questions. Don't see your question?Contact our customer service team. We would be glad to assist you.

What are the future development trends of linear modules and linear motors?

In the future, linear modules and linear motors will develop towards higher precision, higher speed, smaller size, intelligence, and integration with other advanced technologies (such as artificial intelligence and the Internet of Things).

What parameters need to be provided for customized linear motors?

It is necessary to provide detailed parameters such as load weight, stroke, speed, acceleration, accuracy requirements, installation method, and operating environment so that the manufacturer can design and manufacture a linear motor that meets the requirements.

How long is the customization cycle of linear modules?

The customization cycle depends on the complexity of the customization and the manufacturer's production capacity, generally about 1-4 weeks. The specific time can be determined by communicating with the manufacturer.

Can linear motors be upgraded?

The performance of linear motors can be improved by upgrading them with high-performance drives, optimizing control system parameters, and improving heat dissipation structures.

Is it easy to upgrade the linear module?

It is relatively easy to upgrade the motor, control system, guide rail and other components of the linear module according to actual needs to improve its performance and accuracy.

What is the after-sales maintenance service of linear motors?

Regular manufacturers usually provide comprehensive after-sales maintenance services, including fault diagnosis, maintenance guidance, parts replacement, etc., but the response speed and quality of after-sales maintenance services may vary from manufacturer to manufacturer.

What is the warranty period for linear modules?

The warranty period of linear modules from different manufacturers varies, generally around 1-2 years. The specific warranty period can be confirmed with the manufacturer at the time of purchase.

What should we pay attention to when integrating linear motors with other equipment?

Attention should be paid to issues such as interface compatibility, signal matching, control logic coordination, and installation space and layout between devices to ensure that the devices can work together.

Can the linear module be integrated with other equipment?

Absolutely. Linear modules can be integrated with other devices such as robots, sensors, and vision systems to build more complex and intelligent automated production lines.

What kind of control system do linear motors require?

Linear motors typically require a high-performance motion control system that can achieve precise position control, speed control, and thrust control, such as a dedicated linear motor drive with a motion control card or a high-end PLC.

Products

PABG1000 – Air Floating XY Stage

Ⅰ. Product Overview

Ⅱ. Technical Features

Ⅲ. Application Fields

Ⅳ. Model Selection & Customization

Ⅴ. Product Advantages

Ⅵ. Installation & Maintenance

Ⅶ. Learn More

Related Products